| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for treating a tetraalkylammonium (TAA) ion-containing solution where, even if a cycle that a cation exchange resin or a chelating resin is subjected to contacting treatment with a TAA ion-containing solution, so as to be regenerated is repeated, the phenomenon that the resin is cracked and deteriorated at the initial stage is prevented. SOLUTION: When a TAA ion-containing solution in which the concentration of TAA ions exceeds 0.15 wt.% (such as a photoresist developement waste solution) is treated using at least one resin selected from a strongly acidic cation exchange resin, a weakly acidic cation exchange resin and a chelating resin, or, when TAA ions are adsorbed away from a TAA ion-containing solution using at least one resin selected from a strongly acidic cation exchange resin and a weakly acidic cation exchange resin, and, water is thereafter recovered, in the initial stage of a new resin and the initial stage after the regeneration of the resin, the concentration of TAA ions in the TAA ions-containing solution to be passed is controlled to≤0.15 wt.%, and the solution is contacted with the above at least one resin, so as to adsorb the TAA ions thereon. COPYRIGHT: (C)2007,JPO&INPIT
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