发明名称 |
Vaporizer, film forming apparatus including the same, method of vaporization and method of forming film |
摘要 |
It is aimed at providing a vaporization apparatus and a vaporization method capable of keeping track of a progressive condition of clogging of the apparatus. It is also aimed at providing a vaporization apparatus and a vaporization method capable of eliminating clogging prior to occurrence of complete clogging, without disassembling the apparatus. It provides a vaporization apparatus for introducing a carrier gas from one end of a gas passage and for feeding, the carrier gas including a material solution, from the other end of the gas passage to a vaporization part to thereby vaporize the material solution, characterized in that a mass flow controller (MFC) is provided at the one end of the gas passage, and means for detecting a pressure within the gas passage is provided. The vaporization apparatus is characterized in that the same is provided with means for introducing a chemical solution capable of dissolving therein matters deposited or sticked to the inside of the gas passage, into the gas passage.
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申请公布号 |
US2007166457(A1) |
申请公布日期 |
2007.07.19 |
申请号 |
US20040548202 |
申请日期 |
2004.03.08 |
申请人 |
YAMOTO HISAYOSHI;AKUTO KAZUYA;NAGAOKA KEN;KOBAYASHI HITOSHI;SHOJI MASAFUMI;FUKUGAWA MITSURU |
发明人 |
YAMOTO HISAYOSHI;AKUTO KAZUYA;NAGAOKA KEN;KOBAYASHI HITOSHI;SHOJI MASAFUMI;FUKUGAWA MITSURU |
分类号 |
C23C16/00;C23C16/448;H01L21/31 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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