ELECTROSTATIC DEFLECTION SYSTEM WITH IMPEDANCE MATCHING FOR HIGH POSITIONING ACCURACY

摘要

An apparatus and method for deflecting electron beams (301) with high precision and high throughput. At least one electrode (302, 312) of a deflecting capacitor is connected to a signal source (303, 313) via a coaxial cable (304, 314). A termination resistor (306, 316 is further connected to the coaxial cable and the electrode at the joint (307, 317) of the coaxial cable and the electrode. The termination resistor has a resistance matched to the impedance of the coaxial cable and the electrode has an impedance matched to half of the impedance of the coaxial. The deflecting capacitors of the present invention have a minimized loss of precision due to eddy current. The spacing of electrodes in the deflecting capacitors is reduced by a factor of approximately two compared to the state-the-art system.