| 摘要 |
PROBLEM TO BE SOLVED: To provide a ferroelectric capacitor that has improved polarization inversion characteristics and can be operated stably. SOLUTION: The ferroelectric capacitor comprises a lower electrode, a ferroelectric film formed on the lower electrode, and an upper electrode formed on the ferroelectric film. When the variation of the composition profile of an element for composing the ferroelectric film is 50% or smaller in the film thickness direction of the ferroelectric film, the polarization inversion time of the ferroelectric film is 1μs or smaller. COPYRIGHT: (C)2007,JPO&INPIT
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