| 摘要 |
The proposed single chip device includes a plurality of sense units arranged in a matrix form and each including a metal layer swingable in plural degrees of freedom, a metal post running vertically through a center point of the sense units and connected with the metal layer, an electrode structure disposed below and in parallel with the metal layer and including a plurality of activation electrodes each forming a capacitance with the metal layer, a plurality of sense electrodes sensing a plurality of capacitances formed between the activation electrodes and the metal layer, respectively, to obtain capacitance signals for the capacitances and a stop member to limit the metal layer to swing over a specific range and a circuit receiving the capacitance signals for the capacitances. And the provided device is deposited on an object to determine an inertia of the object.
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