发明名称 CMOS Image Sensor and Method for Manufacturing the Same
摘要 A CMOS image sensor and a method for manufacturing the same are provided. The method includes: preparing a semiconductor substrate in which a device isolation region and an active region are defined; forming a gate pattern including a gate oxide layer and a gate electrode on the semiconductor substrate; implanting n-type impurity ions in a predetermined part of the active region of the semiconductor substrate to form a photodiode region; forming a spacer at a sidewall of the gate pattern; forming a p-type impurity region at a surface of the photodiode region; forming an epitaxial layer on the semiconductor substrate and the gate pattern except for on the device isolation region and the spacers by performing a selective epitaxial growth; and implanting n+ type ions in a transistor region of the semiconductor substrate below the epitaxial layer to form a source/drain region.
申请公布号 US2007166865(A1) 申请公布日期 2007.07.19
申请号 US20060615086 申请日期 2006.12.22
申请人 LEE CHANG EUN 发明人 LEE CHANG EUN
分类号 H01L23/58;H01L21/00;H01L31/06 主分类号 H01L23/58
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