发明名称 Photomasks including multi-layered light-shielding and methods of manufacturing the same
摘要 Example embodiments may provide photomasks including multi-layered light-shielding, and methods of manufacturing the same. An example embodiment may include a transparent substrate, and a multi-layered light-shielding layer having non-transparent and transparent layers alternately laminated on the transparent substrate.
申请公布号 US2007166630(A1) 申请公布日期 2007.07.19
申请号 US20070649775 申请日期 2007.01.05
申请人 SAMSUNG ELECTRONICS CO. LTD. 发明人 KIM CHANG-HWAN;LEE SUK-HO;AN YOUNG-SOO
分类号 B32B9/00;B32B17/06;B32B17/10;G03C5/00;G03F1/00 主分类号 B32B9/00
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