发明名称 |
Photomasks including multi-layered light-shielding and methods of manufacturing the same |
摘要 |
Example embodiments may provide photomasks including multi-layered light-shielding, and methods of manufacturing the same. An example embodiment may include a transparent substrate, and a multi-layered light-shielding layer having non-transparent and transparent layers alternately laminated on the transparent substrate.
|
申请公布号 |
US2007166630(A1) |
申请公布日期 |
2007.07.19 |
申请号 |
US20070649775 |
申请日期 |
2007.01.05 |
申请人 |
SAMSUNG ELECTRONICS CO. LTD. |
发明人 |
KIM CHANG-HWAN;LEE SUK-HO;AN YOUNG-SOO |
分类号 |
B32B9/00;B32B17/06;B32B17/10;G03C5/00;G03F1/00 |
主分类号 |
B32B9/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|