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发明名称
Thermisch stabiler Multilayer-Spiegel für den EUV-Spektralbereich
摘要
申请公布号
DE102004062289(B4)
申请公布日期
2007.07.19
申请号
DE200410062289
申请日期
2004.12.23
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
BENOIT, NICOLAS;FEIGL, TORSTEN;YULIN, SERGIY;KAISER, NORBERT
分类号
G02B5/08;G03F7/20;G21K1/06
主分类号
G02B5/08
代理机构
代理人
主权项
地址
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