| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide the method of manufacturing a product for polishing or planarizing a work item. <P>SOLUTION: There is provided the method of manufacturing a pad which is a polishing pad that is used with polishing slurry and being for polishing or planarizing the front surface of an artifact and which comprises a supermolecule matrix impregnated with a plurality of supermolecule fine elements, which per se, do not substantively polish the surface of the artifact. The method comprises steps of (1) for allocating the supermolecule fine element to a prepolymer for forming the supermolecule matrix, (2) for allowing the prepolymer to be a product by curing the prepolymer to which the supermolecule fine element is allocated, and (3) for cutting the product. <P>COPYRIGHT: (C)2007,JPO&INPIT |
