| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration sensor and an angular velocity sensor using the vibration element, capable of reducing the fluctuations in the characteristics with respect to the fluctuations in the temperature. <P>SOLUTION: There are provided a lower electrode layer 18, a piezoelectric body layer 19, and an upper electrode layer 20 on a Si substrate 16. The unbalance of the thermal expansion coefficients between upper face and lower face of the piezoelectric body layer 19 is reduced by providing a first control layer 17, having thermal expansion coefficient that is smaller than that of the piezoelectric body layer 19 between the Si substrate 16 and the lower electrode layer 18 and a second control layer 21, having thermal expansion coefficient that is smaller than that of the piezoelectric body layer 19 on the upper electrode layer 20. <P>COPYRIGHT: (C)2007,JPO&INPIT |
