摘要 |
<p>A probe array substrate, wherein probe holders (102) having a groove (105) are aligned at definite intervals on a solid substrate (100), is constructed by anisotropically etching a monocrystalline silicone board. Then, a probe solution is supplied from multiple tank arrays having a definite cylinder cycle into the probe holders by capillary action. Thus, a probe array, which is usable as, for example, a DNA chip or an antigen chip, has a high integration density and can sustain a definite and sufficient amount of probe molecules, can be formed.</p> |