发明名称 IMPROVED BANDWIDTH ESTIMATION
摘要 A bandwidth meter method and apparatus for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter which provides a first and second output representing, respectively, a first and second parameter indicative of the bandwidth The wavelength calculation utilizes the first and second parameters as part of a multivariate equation employing predetermined calibration variables specific to the optical bandwidth monitor
申请公布号 WO2005001523(A3) 申请公布日期 2007.07.19
申请号 WO2004US18944 申请日期 2004.06.14
申请人 CYMER, INC.;RAFAC, ROBERT, J. 发明人 RAFAC, ROBERT, J.
分类号 G01B9/02;G01J3/02;G01J3/28;G01J3/45 主分类号 G01B9/02
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