发明名称 |
IMPROVED BANDWIDTH ESTIMATION |
摘要 |
A bandwidth meter method and apparatus for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter which provides a first and second output representing, respectively, a first and second parameter indicative of the bandwidth The wavelength calculation utilizes the first and second parameters as part of a multivariate equation employing predetermined calibration variables specific to the optical bandwidth monitor |
申请公布号 |
WO2005001523(A3) |
申请公布日期 |
2007.07.19 |
申请号 |
WO2004US18944 |
申请日期 |
2004.06.14 |
申请人 |
CYMER, INC.;RAFAC, ROBERT, J. |
发明人 |
RAFAC, ROBERT, J. |
分类号 |
G01B9/02;G01J3/02;G01J3/28;G01J3/45 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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