METALLIC FOREIGN MATTERS REMOVING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a metallic foreign matters removing method capable of removing finer metallic foreign matters which cannot be removed by a conventional method.

SOLUTION: Spherical bodies 1 consisting of magnetic materials with their surface being subjected to the chromizing processing are filled in an internal space of a cylindrical body 2 in a laminated state. The magnetic field is generated in the filling spaces of the spherical bodies 1 to magnetize the spherical bodies 1. Metallic foreign matters are attracted by the magnetic force to the spherical bodies 1 and removed by passing a raw material for a semi-conductor sealant with the metallic foreign matters mixed therein through the filling spaces of the spherical bodies 1 while the cylindrical body 2 is intermittently or continuously oscillated.

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