| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a nitride-based light emitting element and a manufacturing method thereof. <P>SOLUTION: This nitride-based light emitting element comprises: an n-clad layer disposed on a single crystal wafer; a porous layer formed by subjecting the n-clad layer from the upper surface to a predetermined depth to surface treatment in a mixed gas atmosphere of HCl and NH<SB>3</SB>; and an activated layer and p-clad layer disposed on the porous layer in this order. <P>COPYRIGHT: (C)2007,JPO&INPIT |
