| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate bonding apparatus for a liquid crystal display element, the apparatus that subdivides its venting holes to enhance uniformity of venting. SOLUTION: The substrate bonding apparatus bonding first and second substrates using a venting process includes a lower chucking plate which chucks the second substrate and an upper chucking plate which includes a plurality of blocks each having a main venting hole, wherein the upper chucking plate chucks the first substrate in accordance with a chucking operation of the blocks and releases the chucked first substrate to fall down toward the second substrate. COPYRIGHT: (C)2007,JPO&INPIT |
