| 摘要 |
The present invention relates to a vaporizer for CVD, a solution-vaporization type CVD apparatus and a vaporization method for CVD which suppress clogging of a solution pipe or the like and extend continuous operation times. A vaporizer for CVD of the present invention comprises a plurality of raw-material solution pipes which respectively supply a plurality of raw-material solutions separately from one another, a carrier gas pipe disposed in such a manner as to surround the exteriors of the raw-material-solution pipes and allows the pressurized carrier gas to flow to the exterior of each of the plurality of raw-material-solution pipes, an orifice provided in the leading end of the carrier gas pipe, and spaced away from the leading ends of the raw-material-solution pipes, a vaporization tube connected to the leading end of the carrier gas pipe and led to the interior of the carrier gas pipe via the orifice, and a heater which is heating means for heating the vaporization tube.
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