Liquid delivering apparatus and method of producing the same

摘要

A liquid delivering apparatus includes at least one piezoelectric element which deforms upon application of a drive voltage thereto, an oscillating plate on which the piezoelectric element is laminated and which is oscillated by deformation of the piezoelectric element, and at least one liquid chamber which stores liquid and which is formed adjacent to the oscillating plate on one of opposite sides thereof that is remote from the piezoelectric element. The liquid in the liquid chamber is given pressure by the deformation of the piezoelectric element, so that the liquid is delivered to an exterior of the apparatus. The liquid chamber is formed in a laminated member including a first layer and a second layer bonded integrally to each other, such that at least one portion of the first layer corresponding to the at least one liquid chamber is recessed by etching to such an extent that at least one portion of the second layer corresponding to the at least one portion of the first layer is exposed. The second layer constitutes the oscillating plate and has resistance to conditions under which the first layer is etched.