发明名称 |
SEM technique for imaging and measuring electronic transport in nanocomposites based on electric field induced contrast |
摘要 |
Methods and apparatus are described for SEM imaging and measuring electronic transport in nanocomposites based on electric field induced contrast. A method includes mounting a sample onto a sample holder, the sample including a sample material; wire bonding leads from the sample holder onto the sample; placing the sample holder in a vacuum chamber of a scanning electron microscope; connecting leads from the sample holder to a power source located outside the vacuum chamber; controlling secondary electron emission from the sample by applying a predetermined voltage to the sample through the leads; and generating an image of the secondary electron emission from the sample. An apparatus includes a sample holder for a scanning electron microscope having an electrical interconnect and leads on top of the sample holder electrically connected to the electrical interconnect; a power source and a controller connected to the electrical interconnect for applying voltage to the sample holder to control the secondary electron emission from a sample mounted on the sample holder; and a computer coupled to a secondary electron detector to generate images of the secondary electron emission from the sample.
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申请公布号 |
US2007164218(A1) |
申请公布日期 |
2007.07.19 |
申请号 |
US20060331840 |
申请日期 |
2006.01.13 |
申请人 |
JESSE STEPHEN;GEOHEGAN DAVID B;GUILLORN MICHAEL |
发明人 |
JESSE STEPHEN;GEOHEGAN DAVID B.;GUILLORN MICHAEL |
分类号 |
G01N23/225;G21K7/00;H01J37/256 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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