发明名称 METHOD OF FABRICATING A FIN FIELD EFFECT TRANSISTOR IN A SEMICONDUCTOR DEVICE
摘要 A method for fabricating a fin FET in a semiconductor device. The method includes sequentially depositing first and second insulation films on a semiconductor substrate, etching the first and second insulation films using a first mask to form a trench, and depositing a first conductor in the trench.
申请公布号 US2007166891(A1) 申请公布日期 2007.07.19
申请号 US20060608589 申请日期 2006.12.08
申请人 PARK JEONG-HO 发明人 PARK JEONG-HO
分类号 H01L21/84;H01L21/00 主分类号 H01L21/84
代理机构 代理人
主权项
地址