发明名称 Semiconductor device of high breakdown voltage and manufacturing method thereof
摘要 Disclosed are a semiconductor device of high breakdown voltage and a method manufacturing the same. According to the invention, it is possible to previously prevent an increase size of the device due to a separation of a high concentration impurity layer and a gate electrode pattern by embedding the gate electrode pattern in a bottom of a semiconductor substrate, and sequentially stacking a low concentration impurity layer and a high concentration impurity layer for source/drain diffusion layers on both sides of the gate electrode pattern, thereby allowing the high concentration impurity layer to easily secure a voltage drop areas necessary for itself without being spaced from the gate electrode pattern.
申请公布号 US2007164355(A1) 申请公布日期 2007.07.19
申请号 US20050598495 申请日期 2005.03.02
申请人 RHEE TAE-POK 发明人 RHEE TAE-POK
分类号 H01L29/76;H01L21/336;H01L29/10;H01L29/78 主分类号 H01L29/76
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