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发明名称
Vorrichtung und Verfahren zur Erzeugzung von Diamantschichten
摘要
申请公布号
DE60035082(D1)
申请公布日期
2007.07.19
申请号
DE20006035082
申请日期
2000.04.05
申请人
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
发明人
LEE, WOOK-SEONG;BAIK, YOUNG JOON;EUN, KWANG YONG
分类号
C23C16/26;H01L21/208;C23C16/00;C23C16/27;C23C16/32;C23C16/50;H01J37/32;H01L21/31;H01L21/469;H05H1/24
主分类号
C23C16/26
代理机构
代理人
主权项
地址
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