| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a magnetically elevated wide-area stage device capable of executing wide-area transfer in multiaxial directions and with ultraprecise position control. <P>SOLUTION: The magnetically elevated stage device is composed of a lower transfer base (10) provided with a support plate (11) forming a horizontal plane, a coil module array (20) installed on the upper face of the support plate (11) so as to generate an electromagnetic field, a stage (30) transferred while being elevated at the upper side of the lower transfer base (10), and a permanent magnet array (40) in which a plurality of permanent magnets (41, 42) are arrayed and arranged on a lower face of the stage (30). The coil module array (20) is composed of a plurality of coil modules (21) on the upper face of the support plate (11). However, the coil modules (21) are arranged orthogonally to each other into a grid form of a shogi (Japanese chess) board so that a coil winding direction is perpendicular between the coil modules (21) adjacent to each other. <P>COPYRIGHT: (C)2007,JPO&INPIT |
