| 摘要 |
PROBLEM TO BE SOLVED: To provide a production method for improving the uniformity of quality of a coating layer. SOLUTION: Relative movement between a coating head and a substrate is utilized to coat a coating composition fluid delivered from a coating head onto a substrate. A pressure environment of coating beads between the substrate and the coating head is regulated by a control system to regulate a coating bead upstream meniscus length or stability, and the production process falls within a defect-free coating region. Thus, a coating head structure is constructed, the angle of incidence between the substrate and the coating head is regulated, a change in degree of inclination of pressure of the coating beads is regulated, and the yield of the production process is improved. Further, the vibration of the coating bead downstream meniscus is reduced by a waveform having defect frequency and phase difference through defect frequency prediction to reduce defective production and thus to improve the yield of the production process. COPYRIGHT: (C)2007,JPO&INPIT
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