| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell module excellent in the photoelectric conversion efficiency without deteriorating element characteristics. <P>SOLUTION: The method includes: a step for forming a conductive transparent electrode film on a transparent substrate; a first division step for dividing it into two or more regions by forming grooves on the above conductive transparent electrode film; a step for forming a silicon-based thin film semiconductor layer film on the transparent substrate, a second division step for dividing it into two or more regions by forming grooves on the silicon-based thin film semiconductor layer film; a step for forming a metal electrode film on the transparent substrate; and a third division step for dividing it into two or more regions by forming grooves on the metal electrode film. At least one of the first, second and third division steps includes a laser beam irradiation step, and the laser beam irradiation step comprises a cutoff step for cutting off a portion acted as both ends in a direction which intersects perpendicularly with grooves, and an irradiation step for irradiating a film to be separated after being cut off. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
