| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a MEMS resonator that can be driven with a high Q value at a high efficiency by reducing an energy loss without vibration leakage. <P>SOLUTION: The MEMS resonator is provided with: four both-end free beams 31 to 34 formed on a board 20; a MEMS structure 40 configured in linkage wherein connection parts 41 to 44 are connected in crossing at positions whereat the both-end free beams 31 to 34 take nodes of vibration, and support beams 51 to 54 extended radially to the connection parts to support the MEMS structure 40, and the both-end free beams are driven vertically with respect to the board 20 by applying AC voltages with the same frequency and inverted phases to the both-end free beams adjacent to each other among the plurality of both-end free beams. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
