| 摘要 |
PROBLEM TO BE SOLVED: To provide a non-linear element which is improved in all of non-linearity, prevention of an element drift phenomenon causing an after-image phenomenon, and prevention of an irreversible shift phenomenon of the non-linearity causing burning, and also to provide an electrooptical device employing the non-linear element as a pixel switching element, and a method of manufacturing the non-linear element. SOLUTION: The non-linear element 10x is a TFD (thin film diode) element provided with: a lower electrode 13x; an insulation layer 14x covering the surface of the lower electrode 13x; and an upper electrode 15x opposite to the lower electrode 13x via the insulation layer 14x. The tantalum oxide film used for the insulation layer 14x contains tungsten, hydrogen and nitrogen. The hydrogen and nitrogen improve the non-linearity, and the tungsten, and hydrogen prevent the generation of the element drift phenomenon causing the after-effect phenomenon. The nitrogen prevents separation of the hydrogen in applying voltage. COPYRIGHT: (C)2007,JPO&INPIT |
