| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspecting method for quickly performing both the inspections of penetration inspection and inspection, such as foreign matters when performing both the inspections of the penetration inspection of vacancy in a product and the inspection, such as the foreign matters, and to provide an inspecting device. SOLUTION: The inspection method includes a process for mounting the product in a ventilation hole of a work stage; a process for penetration inspection for determining the presence of a through hole, on the basis of a pressure reduction state in product vacancy in a prescribed time, by supplying compressed air toward the vacancy inside from a compressed air supply means of a penetration inspection system and closing a valve so as to prevent leak from the inside of the vacancy; and a process of the inspection, such as foreign matters for determining the presence of the foreign matters or the like of the vacancy on the basis of a measured wind state, by drawing the air in the vacancy by a vacuum means of foreign matters or the like inspection system and measuring the state of wind introduced inside of the vacancy from a second opening part with a sensor. After performing either the process of penetration inspection process or the foreign matters or the like inspection, a ventilation tube, used for the remaining other, is changed over to the ventilation hole so as to communicate with the ventilation hole of the work stage, and the remaining process is performed. COPYRIGHT: (C)2007,JPO&INPIT
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