| 摘要 |
PROBLEM TO BE SOLVED: To provide a calibration method for a profiling probe for performing calibration of the profiling probe accurately in a short time. SOLUTION: A first measuring path 71 and a second measuring path 72 are set as measuring path for performing profiling measurement of the surface of a master ball 7, a sphere whose radius and center coordinate value are known (measuring path setting process). Next, the first measuring path 71 and second measuring path 72 set in the measuring path setting process are profiling measured (measuring process). An output value of a detection sensor of the profiling probe in the measuring process is compared with the coordinate values on the measuring paths 71 and 72, and corrective data for correcting the output value of the detection sensor is calculated (corrective data calculating process). Here, the first measuring path 71 and second measuring path 72 set in the measuring path setting process have a spiral shape on the surface of the master ball 7. Origins 711 and 721 of two measuring paths 71 and 72 are shifted by 90°on the equator. COPYRIGHT: (C)2007,JPO&INPIT
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