| 摘要 |
PROBLEM TO BE SOLVED: To assure the high flatness of a resin film of a pellicle optical element, and to easily manage the coating volume of an adhesive for bonding the resin film to a frame. SOLUTION: A contact surface 12 for assuring the flatness of the resin film 3 by making contact with the resin film 3 along the outer peripheral side of an aperture 11, and a bonding surface 13 having a difference in level from the contact surface 12 along the outer peripheral side of the contact surface 12 are formed on the frame 10. The epoxy adhesive 2 for bonding the resin film 3 to the frame 10 is applied between the bonding surface 13 of the frame 10 and the part of the resin film 3 facing the bonding surface 13. COPYRIGHT: (C)2007,JPO&INPIT |
