发明名称 Laser Nozzle Methods And Apparatus For Surface Cleaning
摘要 Apparatuses and methods for cleaning a surface comprising contaminate particles are provided. In one respect, plasma and/or a shockwave may be created in a fluid flowing through a nozzle. The nozzle, coupled to a laser source and a fluid feed may be configured to deliver the generated plasma and/or shockwave to the surface.
申请公布号 US2007163715(A1) 申请公布日期 2007.07.19
申请号 US20060532700 申请日期 2006.09.18
申请人 发明人 RASTEGAR ABBAS
分类号 H01L21/306 主分类号 H01L21/306
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