发明名称 METHOD OF FORMING A MICRO DEVICE
摘要 A method of forming a micro device includes using a light source which has a first wavelength beaming to a photo resist which is suited for a second wavelength, developing the photo resist which is suited for the second wavelength to form a plurality of sensitization block, and performing a heating process on the sensitization block to form a micro device.
申请公布号 US2007166649(A1) 申请公布日期 2007.07.19
申请号 US20060307002 申请日期 2006.01.18
申请人 YU CHENG-HUNG 发明人 YU CHENG-HUNG
分类号 G03C5/00 主分类号 G03C5/00
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