MICRO-ELECTROMECHANICAL SYSTEM COMPRISING A DEFORMABLE PORTION AND A STRESS SENSOR

摘要

A micro-electromechanical system comprises a deformable portion (1) and at least one stress sensor (10) fixedly attached to the deformable portion. The sensor itself comprises a base portion (2) and a shunt portion (3) juxtaposed on the deformable portion (1), and connections (4a-4d) arranged to detect a change of a distribution of an electric current in the base and shunt portions. Such a system is suitable for many applications, in particular for forming a portion of an arm of an atomic force microscope or for entering into the constitution of a biosensor.