XY STAGE MODULE, STORAGE SYSTEM EMPLOYING THE SAME, AND METHOD FOR FABRICATING THE XY STAGE MODULE

摘要

PROBLEM TO BE SOLVED: To provide the XY stage module, a storage system employing the same, and a method for fabricating the XY stage module. SOLUTION: The XY stage module includes a base, an XY stage horizontally moving above the base in a first direction and a second direction that is orthogonal to the first direction, a supporting unit disposed at the base for elastically supporting the XY stage, a stiffener for preventing the XY stage from being rotated, a position sensor having a movable comb-shaped structure disposed at one side of the stiffener and having at least one or more movable combs and a fixed com-shaped structure fixed on the base and having at least one or more fixed combs meshed with the movable combs to be separated at a predetermined gap for measuring a movement of the XY stage in the first direction and the second direction according to the level of meshing between the movable comb and the fixed comb. COPYRIGHT: (C)2007,JPO&INPIT