CONDUCTIVE POLYPYRROLE THIN FILM AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing efficiently a polymer thin film having high conductivity and high quality by a dry process not using a solvent, the conductive polymer thin film, and its use or the like. SOLUTION: The manufacturing method of the homogeneous polymer thin film having high electric conductivity and high density is characterized by including a process wherein a dopant comprising alkylbenzene sulfonic acid or the like is introduced in a vacuum atmosphere into a thin film manufactured by plasma-polymerizing pyrrole. The conductive thin film having a conductivity over 10-6Scm-1in the air at a room temperature is manufactured by the method. A conductive member and a chemical sensor member such as a VOC gas sensor including the conductive thin film as a component are also provided. COPYRIGHT: (C)2007,JPO&INPIT