| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaluation device for a driving characteristic of a scanner and its evaluation method. SOLUTION: This device is equipped with a light source 101 for irradiating a beam, an objective lens 109 arranged between the light source and a scanning mirror 100 and having a focal point on the scanning mirror, a position sensing element 115 for receiving a reflected beam reflected by the scanning mirror and transmitted through the objective lens and sensing a change of a rotation angle of the scanning mirror, and signal processing parts 121, 125 for processing a signal sensed by the position sensing element. The reflected beam is adjusted to be a beam parallel to a beam irradiated from the light source and entering the objective lens regardless of the change of the rotation angle of the scanning mirror. COPYRIGHT: (C)2007,JPO&INPIT
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