| 摘要 |
A sputtering apparatus is provided with a DC power supply 1 , an inverter 2 that converts DC voltage to AC voltage, a matching circuit 10 that transforms the AC voltage, a rectifier 4 that converts the transformed AC voltage to direct current, and a sputtering load 6 . The matching circuit 10 has a transformer 3 that transforms AC voltage from the inverter 2 , inductance L provided in series with at least one of the primary winding 31 and secondary winding 32 , and a condenser C provided in parallel with at least one of the primary winding 31 and secondary winding 32 through inductance L.
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