发明名称 Transistor and method for manufacturing the same
摘要 A transistor including a semiconductor substrate defined with an active region and a device isolation region, a gate formed on the semiconductor substrate, an insulating spacers formed on respective side walls of the gate, and source/drain junctions formed in the semiconductor substrate at opposite sides of the gate, the source/drain junctions having asymmetrical junction structures, respectively, wherein the gate has a lower portion arranged on the active region of the substrate, the lower gate portion having a stepped profile having a lower surface, an upper surface and a vertically-extending side surface. The invention also provides a method for manufacturing this transistor. In accordance with this transistor structure, an increase in the dopant concentration of a storage node is prevented. Accordingly, a reduction in the amount of leakage current is achieved, so that an improvement in the refresh characteristics of the transistor is achieved.
申请公布号 US7244650(B2) 申请公布日期 2007.07.17
申请号 US20050039746 申请日期 2005.01.18
申请人 HYNIX SEMICONDUCTOR INC. 发明人 SUH MOON SIK
分类号 H01L21/8242;H01L21/336;H01L29/10;H01L29/78;H01L29/788 主分类号 H01L21/8242
代理机构 代理人
主权项
地址