| 发明名称 |
Method and system to provide electrical contacts for electrotreating processes |
| 摘要 |
Systems and methods to provide electrical contacts to a workpiece to facilitate electrotreating processes, including electroplating and electroetching processes are presented.
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| 申请公布号 |
US7244347(B2) |
申请公布日期 |
2007.07.17 |
| 申请号 |
US20020282911 |
申请日期 |
2002.10.28 |
| 申请人 |
NOVELLUS SYSTEMS, INC. |
发明人 |
BASOL BULENT M.;TALIEH HOMAYOUN;UZOH CYPRIAN E. |
| 分类号 |
C25D21/12;C25D7/12;C25D17/00;H01L21/00;H01L21/288;H01L21/321;H01L21/768 |
主分类号 |
C25D21/12 |
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