发明名称 |
Method to achieve low and stable ferromagnetic coupling field |
摘要 |
A method for making a spin valve includes providing a substrate; depositing a first ferromagnetic layer having a first surface on the substrate; depositing a spacer layer having a second surface; depositing a second ferromagnetic layer, wherein the spacer layer is disposed between the first and second ferromagnetic layers; and exposing one or more of the first and second surfaces to an oxygen partial pressure, then decreasing the oxygen partial pressure before depositing a subsequent layer. One or more of the first and second surfaces may be exposed to an oxygen partial pressure of between about 1x10<SUP>-7 </SUP>Torr and about 5x10<SUP>-5 </SUP>Torr.
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申请公布号 |
US7244341(B2) |
申请公布日期 |
2007.07.17 |
申请号 |
US20030693276 |
申请日期 |
2003.10.23 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
PINARBASI MUSTAFA |
分类号 |
C23C14/35;C23C16/00;G01R33/09;G11B5/31;G11B5/39;H01F10/16;H01F10/32;H01F41/30;H01L43/08;H01L43/12 |
主分类号 |
C23C14/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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