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发明名称
晶圆玻璃护片之移除方法及装置
摘要
一种晶圆玻璃护片之移除方法及装置,其主要是将晶圆固定于一真空吸盘上,再使多数个均匀排列于晶圆上方的吸嘴吸附于玻璃护片上,之后一刀片由晶圆与玻璃的间隙插入,使该位置的玻璃护片先与晶圆脱离,之后由最接近刀片的吸嘴开始作动往上吸引玻璃护片往上脱离,并使相邻的吸嘴依序作动逐步将玻璃护片由接近刀片位置往另一侧脱离,直至该玻璃护片完全自晶圆表面移除。
申请公布号
TW200726712
申请公布日期
2007.07.16
申请号
TW095100565
申请日期
2006.01.06
申请人
朱文庆
发明人
朱文庆
分类号
B65H41/00(2006.01);H01L21/00(2006.01)
主分类号
B65H41/00(2006.01)
代理机构
代理人
主权项
地址
台中县太平市东平路430号13楼之15
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