Coating a tool with titanium, zirconium, hafnium, vanadium, niobium, tantalum or chromium carbonitride by chemical vapor deposition comprises increasing the temperature during deposition
摘要
申请公布号
AT503050(A1)
申请公布日期
2007.07.15
申请号
AT20050001876
申请日期
2005.11.17
申请人
BOEHLERIT GMBH & CO.KG.
发明人
PITONAK REINHARD;GARCIA JOSE;WEISSENBACHER RONALD;UDIER KLAUS