METHODEN ZUR ABSCHEIDUNG VON ATOMSCHICHTEN,申请号AT20030771691T-传众专利搜索

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发明名称	METHODEN ZUR ABSCHEIDUNG VON ATOMSCHICHTEN
摘要
申请公布号	AT365817(T)	申请公布日期	2007.07.15
申请号	AT20030771691T	申请日期	2003.07.21
申请人	MICRON TECHNOLOGY, INC.	发明人	CASTROVILLO, PAUL;BASCERI, CEM;DERDERIAN, GARO;SANDHU, GURTEJ
分类号	C23C16/34;C23C16/44;C23C14/06;C23C14/08;C23C16/40;C23C16/455;C30B25/14;H01L21/285;H01L21/316;H01L21/768	主分类号	C23C16/34
代理机构		代理人
主权项
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