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发明名称
COATING FILM FORMING APPARATUS AND COATING UNIT CROSS-REFERENCE TO RELATED APPLICATIONS
摘要
申请公布号
KR100739209(B1)
申请公布日期
2007.07.13
申请号
KR20070013949
申请日期
2007.02.09
申请人
发明人
分类号
H01L21/027;G03F7/16;H01L21/00
主分类号
H01L21/027
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代理人
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地址
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