METHOD FOR FORMING HIGH QUALITY MULTIPLE THICKNESS OXIDE LAYERS BY USING HIGH TEMPERATURE DESCUM,申请号KR20027012481-传众专利搜索

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发明名称	METHOD FOR FORMING HIGH QUALITY MULTIPLE THICKNESS OXIDE LAYERS BY USING HIGH TEMPERATURE DESCUM
摘要
申请公布号	KR100737984(B1)	申请公布日期	2007.07.13
申请号	KR20027012481	申请日期	2002.09.19
申请人		发明人
分类号	H01L21/316	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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