| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a pattern with low manufacturing cost, by removing a photoresist without having to use a photoresist stripper, and manufacturing an LCD device, and to provide a method for manufacturing the LCD device using the same. <P>SOLUTION: The method for forming the pattern includes a step of sequentially forming a pattern material layer 200a, a transformed material layer 250a and a photoresist layer 300a on a substrate 100; a step of patterning the photoresist layer 300a by exposure and development by using a mask; a step of selectively etching the transformed material layer 250a and the pattern material layer 200a, by using the patterned photoresist layer 300a as a mask; and a step of removing the transformed material layer in a lift-off method by applying a light, and at the same time, of removing the patterned photoresist layer. <P>COPYRIGHT: (C)2007,JPO&INPIT |
