发明名称 METHOD FOR FABRICATING THIN FILM PATTERN AND METHOD FOR FABRICATING FLAT PANEL DISPLAY DEVICE USING SAME
摘要 PROBLEM TO BE SOLVED: To provide a method for fabricating a thin film pattern and a method for fabricating a flat panel display device using the same that are adaptive for forming an organic material pattern having step coverage by not using a photolithography process to control a capacitance value of a capacitor. SOLUTION: The method for fabricating a thin film pattern includes steps of: forming a first conductive thin film pattern on a substrate; forming a master mold provided with a second thin film pattern; applying an organic material on the master mold provided with the second thin film pattern; joining the substrate and the master mold to bring the first thin film pattern and a surface of the substrate into contact with the organic material; hardening the organic material; and separating the substrate and the master mold from each other to provide an organic thin film pattern having step coverage formed by the second thin film pattern on a substrate provided with the first thin film pattern. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007178995(A) 申请公布日期 2007.07.12
申请号 JP20060207623 申请日期 2006.07.31
申请人 LG PHILLIPS LCD CO LTD 发明人 KIM JIN WUK
分类号 G02F1/1368;G09F9/30;H01L21/336;H01L21/768;H01L23/522;H01L29/786 主分类号 G02F1/1368
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