| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a suction body which can be arbitrarily adjusted in shape and width of the partition wall, and has a superior planarity. SOLUTION: On the suction face 3 side of a porous plate 1, a plurality of grooves are concentrically formed in such a manner that they may not reach a suction face 2. The grooves 4 are uniformly filled up with an adhesive having an appropriate viscosity such as epoxy resin, polyimide adhesive, and glass-based adhesive, and the adhesive is hardened to form the partition walls 5. Then, the porous plate 1 is inserted into a concave portion 15 of a case 10 and bonded and fixed. Thereafter, the suction face 2 is so polished that the partition walls 5 may be exposed by 0-1 mm in width. COPYRIGHT: (C)2007,JPO&INPIT |
