| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion spectral analyzer, which measures the structure or strain of a crystal material with high accuracy, without the need for rotating a sample frequently or requiring the accurate angle adjustment for the sample. SOLUTION: A two dimensional position sensitivity/time analyzing type detectors 14 and 15 are arranged in a direction of surrounding a scattering angle of 180°(observation angle 0°) and a direction surrounding a scattering angle of 135°(observation angle of 45°). COPYRIGHT: (C)2007,JPO&INPIT
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