FOREIGN MATTER REMOVING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a foreign matter removing apparatus which is capable of automatically removing the foreign matter attached to the target and can prevent the removed foreign matter from being both reattached to the target and dispersed to the surroundings. SOLUTION: The foreign matter removing apparatus is employed to remove the foreign matter attached to the target. The apparatus is provided with a first antistatic mechanism (antistatic mechanism 1), a first fluid ejection mechanism (air jetting mechanism 3) and a first suction mechanism (dust collector). The first antistatic mechanism removes the electric charging of the target. The first fluid ejection mechanism ejects the fluid to the target (tube A) which was statically eliminated and blows away the foreign matter attached to the target. The first suction mechanism sucks the foreign matter blown away by the first fluid ejection mechanism. COPYRIGHT: (C)2007,JPO&INPIT