发明名称 |
ROTATABLE APERTURE MASK ASSEMBLY AND DEPOSITION SYSTEM |
摘要 |
<p>An aperture mask assembly includes a rotatable frame and a mask having apertures. A clamping arrangement is used to tension the mask and to conform the mask to a shape defined by the frame. Tension is applied to the mask in a direction substantially parallel to an axis of the frame and/or around the circumference of the shape defined by the frame. Deposition material emanating from a deposition source located within the rotatable frame is deposited through the mask apertures onto a web.</p> |
申请公布号 |
WO2007078556(A1) |
申请公布日期 |
2007.07.12 |
申请号 |
WO2006US46683 |
申请日期 |
2006.12.07 |
申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
TOKIE, JEFFREY H.;MCCLURE, DONALD J. |
分类号 |
C23C14/04;C23C16/04 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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